Introduction to Focused Ion Beams - Springer
Book Title: Introduction to Focused Ion Beams. Book Subtitle: Instrumentation, Theory, Techniques and Practice. Editors: Lucille A. Giannuzzi, Fred A. Stevie. DOI: https://doi.org/10.1007/b101190. Publisher: Springer New York, NY. eBook Packages: Physics and Astronomy, Physics and Astronomy (R0) Copyright Information: Springer-Verlag US 2005
Introduction to focused ion beams, ion sources, and the nano-aperture ...
2019年1月1日 · In this chapter the basics of focused ion beam (FIB) systems are summarized and the nano-aperture ion source (NAIS) is introduced. First a brief overview of ion-surface interactions and their applications is given. Next, the most important optical aspects of FIB systems are discussed and a comparison of different ion sources is made.
Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques ...
2004年11月19日 · Introduction to Focused Ion Beams is geared towards techniques and applications. The first portion of this book introduces the basics of FIB instrumentation, milling, and deposition capabilities. The chapter dedicated to ion-solid interactions is presented so that the FIB user can understand which parameters will influence FIB milling behavior.
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Fundamentally, a focused ion beam system produces and directs a stream of high-energy ionized atoms of a relatively massive element, focusing them onto the sample both for the purpose of etching or milling the surface and as a method of imaging.
Focused ion beams: An overview of the technology and its …
2020年5月29日 · Focused Ion Beams (FIBs) are considered a key technology. Today, different FIBs, including stand-alone FIB systems, gallium Focused Ion Beam Scanning Electron Microscopes (FIB/SEMs), plasma FIB/SEMs as well as the Helium Ion Microscope (HIM) help answer research questions and drive nanofabrication like no other technology can.
[PDF] Introduction to Focused Ion Beams | Semantic Scholar
Scanning ion microscopy applications of novel focused ion beam (FIB) systems based on ultracold rubidium (Rb) and cesium (Cs) atoms were investigated via ion-induced electron and ion yields. Results … Expand
1 - Introduction to the focused ion beam system
An important tool that has successfully met these challenges and promises to continue to meet future nanoscale demands is the focused ion beam (FIB) system. The technology offers the unsurpassed opportunities of direct micro- and nano-scale deposition or materials removal anywhere on a solid surface; this has made feasible a broad range of ...
Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques ...
2005年1月1日 · Focused ion beam (FIB) is frequently used to prepare electron- and X-ray-beam-transparent thin sections of samples, called lamellae. Typically, lamellae are prepared from only a subregion...
Introduction to Focused Ion Beams - Google Books
Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one...
Introduction to Focused Ion Beam Nanometrology - IOPscience
This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology.
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